[labnetwork] CO2 purity for CPD?

[julia.aebersold at louisville.edu]

We use CPD and 5N purity which is standard for most of our gases.  We haven't used 3N so I can't comment on differences.


Cheers!


Julia Aebersold, Ph.D.

MNTC Cleanroom Manager

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292

(502) 852-1572

http://louisville.edu/micronano/<http://louisville.edu/micronano>


________________________________
From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Mariusz Martyniuk [mariusz.martyniuk at uwa.edu.au]
Sent: Friday, October 28, 2016 4:18 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] CO2 purity for CPD?

Dear LabNetwork,

I would like to investigate what purity of CO2 is being used for Critical Point Drying (CPD) of MEMS in various labs. Could I please ask for a reply with a comment if you are using CPD? Did anyone investigate if there are significant benefits of using  5N over 3N purity of CO2?

Cheers,
Marius

Mariusz Martyniuk
-----------------------------
Associate Professor, ANFF-WA Managing Director
Microelectronics Research Group
School of Electrical, Electronic & Computer Engineering, Rm 4.17, M018
The University of Western Australia
35 Stirling Highway, Crawley WA 6009, Australia<UrlBlockedError.aspx>
Tel: +61 8 6488 1905<tel:+61%208%206488%201905>, Fax: +61 8 6488 1095<tel:+61%208%206488%201095>
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