[labnetwork] in situ p-doped (boron) polysilicon deposition capability

Robert Vandusen Robert_Vandusen at cunet.carleton.ca
Mon Sep 19 18:07:27 EDT 2016


Hi all.
There is a client looking for in situ p-doped (boron) polysilicon deposition capability.
Our polysilicon system is down at the moment so we are unable to help him at this time.

I was just wondering if there were any other labs with this capability where he might be able to help him out.

Much appreciated.
Robert Vandusen
Microfabrication and FANSSI Cleanlab Facility Manager
Electronics Department
Carleton University
Ottawa, Ontario, Canada
room: 4184 Mackenzie Building
613-520-2600 ext 5761
rvanduse at doe.carleton.ca

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