[labnetwork] InGaN or GaN sputter target

[Chan H Kim]

Dear all,

I have a user who wants to use InGaN or GaN target in our Sputter system.
We do not have experience with these materials.
So I would like to ask your opinion if there is any issue including cross contamination.
Thank you.

Regards,
Chan Kim, PhD
Associate development engineer
CNM2 (Center for Nano-Micro Manufacturing)
University of California Davis


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