[labnetwork] ALD of Iron oxide

[Chito Kendrick]

Dear Labnetwork colleagues,

I have a user that wants to study iron oxide using our home/custom build 
ALD. Currently it is still going under optimization for HfO2 as I just 
got it running a month ago. Our system would have the capabilities to 
run some of the lesser hazardous precursors, but I was wanting to know 
if anyone has experience with doing ALD of FeOx and if there are any 
major issues to look out for, e.g. contamination, build up of toxic by 
products. The user only wants to study samples with 1-2 ML depositions 
with water as the oxidizer.

Regards.

Chito Kendrick


-- 
Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>

Managing Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295

814-308-4255
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