[labnetwork] Experience with CdS and dry etching

[Mark Morgan]

Greetings all,

we have a user that’s interested in putting CdS in our etchers and i am loath to allow it due to its toxicity but i thought i’d poll the group and hear what others have done. 

Any have experience with dry etching of this material? or experience with this material as part of a process within your etchers but not the primary etch target?

Thank you so much for your comments and input.

best regards


Mark D. Morgan
Research Engineer, Washington Nanofabrication Facility (WNF)
National Nanotechnology Coordinated Infrastructure (NNCI)
University of Washington
Fluke Hall 132, Box 352143
(206) 221-6349
mmorgan3 at uw.edu <mailto:mmorgan3 at uw.edu>
http://www.wnf.washington.edu/ <http://www.wnf.washington.edu/>
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