[labnetwork] Sputtering LiNbO3

[Nava Ariel-Sternberg]

Hi Fouad, 

 

This depends on the cleanliness level and applications in your facility. Alkali ions can contaminate and compromise insulating properties of dielectrics. Li is what I would be more worried about. If you have several sputtering systems I would allow LiNbO3 in the less clean one. 

 

Thanks,

Nava

 

 

Nava Ariel-Sternberg, Ph.D.

Director of CNI Shared Facilities

Columbia University

530 w120th st., NY 10027

Room 1015/MC 8903

Office: 212-854-9927

Cell: 201-562-7600

 

​

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Fouad Karouta
Sent: Monday, October 23, 2017 7:33 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Sputtering LiNbO3

 

Hi all,

 

We had a request to sputter LiNbO3, we don’t have the target yet. 

My question to the network is:

Does sputtering LiNbO3 in a multi users sputter system (where we have more than 50 targets) create any concerns with respect to toxicity (related to Li or Nb) or to cross-contamination?

 

Thank you,

Fouad Karouta

 

*************************************

Manager ANFF ACT Node

Australian National Fabrication Facility

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Email:  <mailto:fouad.karouta at anu.edu.au> fouad.karouta at anu.edu.au

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