[labnetwork] Dicing tool, saw or diamond scribe & break? Producers?

[Noah Clay]

Svenn,

For scribing/notching, have a look at the Optophase MR 200:

http://www.optophase.com/Brochure/OEG/mr200_en_web.pdf

Loomis’ LSD-100 has also been a workhorse scribing/notching system:

http://www.loomisinc.com/downloads_www/Loomis_LSD-100_breaking.pdf

For wafer dicing, we use an ADT 7122: 

http://www.adt-co.com/ADT2014/userdata/SendFile.asp?DBID=1&LNGID=1&GID=626

Thank you,
Noah Clay

Noah Clay
Director, Quattrone Nanofabrication Facility
School of Engineering & Applied Science
University of Pennsylvania
Philadelphia, PA

(215) 898-9308
nclay at upenn.edu <mailto:nclay at upenn.edu>
> On Sep 5, 2017, at 5:07 AM, Svenn Ove Linde <svenn.linde at ntnu.no> wrote:
> 
> Dear Colleagues
> 
> We consider purchasing a new dicing tool.
> 
> Today we have a Disco saw “DAD-2H/6” (1984) and a Dynatex “DX-III” (1993) diamond scribe and break system.
> 
> Approximately 95% of the dicing processing today is completed with the Dynatex diamond scriber.
> 
> Typical sample and material information
> Wafer Substrate Material
> GaAs, SiO2, Sapphire, Si3N4, Glass, steel alloy (only scribe), Quartz
> Substrates dominant: Si
> Wafer Thickness:
> 200 micrometer – 550 micrometer (Some samples down to 100 micrometer)
> Glass slides up to 1mm (rarely).
> Crystal Orientation:
> For Si mostly (100) but also (111)
> Any “Sensitive Material” in the street:
> Si nano- and microwires.
> “Front side” Surface Coatings:
> Nitride, oxide, common metals <1µm
> “Back side” Surface Coatings:
> Nitride, oxide, common metals <1µm
> Wafer or Sample Dimensions:
> Wafers (2” - 6”) and pieces/different shapes of wafers, like square 1x1 cm.
>  
> 
> I want to check if any of you have recommendations whether we should go for a saw or a diamond scriber.
> 
> We are also interested in producers of this equipment.
> 
> Thanks in advance.
>  
> Best regards,
> Svenn Ove Linde
> NTNU - Norwegian University of Science and Technology
> Faculty of Natural Sciences, NanoLab
> Sem Sælandsvei 14
> NO-7491 Trondheim, Norway
>  
> Homepage:  www.ntnu.no/nanolab <http://www.ntnu.no/nanolab>
>  
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