[labnetwork] Yellow filters for litho room: what specs are out there?

[Dennis Schweiger]

Mario,

when we relamped our cleanroom about a year ago to go from T-12's to LED,
we used this material for the lamps (Tarp50), and this material for the
windows (Madico Amber 81).

The interesting thing is that to do a good job on the UV, the filters are
more orange, than yellow, however that could just be my opinion......

So far, we've had no problems with either one.

Dennis Schweiger
University of Michigan/LNF

734.647.2055 Ofc

On Thu, Dec 20, 2018 at 8:07 PM Beaudoin, Mario <beaudoin at physics.ubc.ca>
wrote:

> Dear Labnetworks community,
>
> I'm in the process of renovating our cleanroom and want yellow filters
> that meet the specs of *Lithoprotect*, specifically, I want way less than
> 1% transmission below 500nm.  *Lithoprotect* (see link below) claims less
> than 0.001% transmission below about 475nm.  In our old cleanroom, we used
> to have traditional 1% yellow windows that turned out to be inadequate for
> our maskless lithography system.
>
>
> https://www.microchemicals.com/technical_information/170823_Lithoprotect_Flyer_EN_Web.pdf
>
> Does anyone know of a US supplier that offers similar product?  On the
> other hand, does anyone know of products that are not quite as performing
> but still offer say 0.01% transmission below 500nm?  We will be using 405nm
> and 365nm light with a traditional mask aligner and a maskless system.  We
> typically use AZ 5214E-IR and nLoF 2020 resists for down to 1um features;
> some users still use Shipley 1813 and we have another set of groups using
> SU-8 resists.  We're not committed to any supplier but do require tight
> performance.
>
> I'm cc'ing our cleanroom manufacturer engineers in this thread.
>
> Regards,
>
> Mario
> --
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