[labnetwork] STS Multiplex DRIE

[Rehn, Larry A]

We are in the process to set up an STS Multiplex system with the Bosch process, too.  The installation work has not begun yet, but we did find a former STS engineer who is familiar with these tools.  He now has his own business to work on these tools.  His name is Gareth Morgan, contact information below:

Suppliers Name: Gareth Morgan
Suppliers Company Name: CTP Company Services
Suppliers Address: 3 Commercial Road
Cwmfelinfach
Nr Newport
Gwent
Email Address: garethmorganctp at outlook.com
Mobile Number: 44 07754002875


Larry A Rehn
Technical Lab Manager
AggieFab Nanofabrication Facility
Texas A&M University
979 845-3199
lrehn at tamu.edu<mailto:lrehn at tamu.edu>
[cid:image001.jpg at 01CEC37D.FAF8C9E0]



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of proma016 at fiu.edu
Sent: Friday, July 27, 2018 4:31 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] STS Multiplex DRIE

Greetings labnetwork

Can someone recommend an FSE for starup and service of an early model STS DRIE bosch process Si etcher?
Sent from my iPhone

On Jul 26, 2018, at 10:06 PM, Paolini, Steven <spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>> wrote:
Both are great systems. We like our Oxford Cobra ICP so much that we bought its sister system in ICPCVD. We have a Plasmatherm Versaline system that runs flawlessly as well. In my 35 years of experience, these systems Represent the best in class for university work.
I can’t think of any cons with either platform.

Steve Paolini
Equipment Dood
Harvard University Center for Nanoscale Systems.

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu<mailto:spaolini at cns.fas.harvard.edu>
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From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chen, Jun
Sent: Thursday, July 26, 2018 12:51 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Experience on ICP-RIE

Dear Colleagues,
We plan to purchase two ICP-RIE systems(Chlorine and Fluorine) recently. Currently we get quote from Oxford Instruments PlasmaPro 100 Cobra300 and  Plasma-Therm Apex SLR ICP.
Does anyone have experience on these systems? What’s the pros and cons?  I would greatly appreciate for your feedback!

best,

Jun Chen, Ph.D.
Nanofabrication scientist,
Petersen Institute of NanoScience and Engineering, and Department of Electrical and Computer Engineering | University of Pittsburgh
3700 O'Hara Street, Pittsburgh, PA 15261
T: 412.383.3282
http://www.nano.pitt.edu/<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nano.pitt.edu_&d=DwMF-g&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=rcBR73_HmJ1YnlhPiz3lpHV6zNZE8DiWyvDcNaBXmLA&s=7UtitOhQns4HNOjOgtfXCIyh2ehYIdyHyMWZTAwp9lM&e=>


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