[labnetwork] Handling of MF-319 Developer

[Sweeney, John]

At Harvard
The PPE requirements for developers that have between 2.5 and 3% Tetramethyl ammonium hydroxide in them:

While pouring from gallon containers into beakers: safety glasses, face shield, disposable chemical apron, one 6 mil pair of nitrile and then over that glove is a longer sleeve type blue nitrile glove (4 mil)
When working with smaller quantities (100 ml beakers and less) we lessen PPE to safety glasses but still double glove (two thin gloves) no apron required.

The latest death related to TMAH was in Korea and it was with 8.75% TMAH (used as a pallet cleaning detergent so this person had his entire legs covered with 8.75% TMAH he died 5 hours later from acute TMAH poisoning) so this material warrants extra precaution.

Thanks

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Beaudoin, Mario
Sent: Monday, October 29, 2018 8:23 PM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Handling of MF-319 Developer


This is also how we do it at our facility.  Safety glasses and nitrile glove (we're phasing out latex gloves but we're still using up our inventory) in the laminar flow vented wetbench (Microzone/DFMZ).  No extra PPE.

Mario



On 2018-10-29 2:34 PM, Aebersold,Julia W. wrote:
At our facility we primarily use MF-319 developer in puddle processing for most of photolithography processes for we do not have a track system.

I am reviewing our PPE for use with this material.  Currently, all clients wear safety glasses and nitrile gloves at our well ventilated developer bench.  I am curious to know if additional PPE is utilized by other facilities and or butyl gloves.

Cheers!

Julia Aebersold
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/<https://urldefense.proofpoint.com/v2/url?u=http-3A__louisville.edu_micronano_&d=DwMF-g&c=WO-RGvefibhHBZq3fL85hQ&r=cRmvgfWT6iFcPiV0SR8BIe2H_crNKrQjWG3MIWJGoPY&m=S28DdnzRGLiqN2fzuyeLtdjlmAJXoqU945F06brmY6c&s=pF3r4nauqGVl3XAPphS0LlwXAsMCZwObTE5n6r2MITk&e=>





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