[labnetwork] Has anyone using thicker than 200nm HSQ for EBL patterning?

[Michael Rooks]

You should be storing HSQ in liquid nitrogen. Check out the presentation
https://nano.yale.edu/sites/default/files/files/hsq_frozen(1).pdf

We have been doing this for five years, and it works great. Five year 
old HSQ is just as good as fresh HSQ.

Getting reliable deliveries from Dow-Corning is an issue, but at least 
we don't have to worry about shelf life anymore.

--------------------------------
Michael Rooks
Yale Institute of Nanoscience and Quantum Engineering
nano.yale.edu <http://nano.yale.edu>



On 04/01/2019 10:08 AM, Mason Risley wrote:
>
> Hi Mark,
>
> Thanks for mentioning about the dry HSQ, I didn’t realize that was 
> available. Do you know if dry HSQ has a better shelf life than the 
> standard XR1541 in MIBK? That’s a challenge my lab is always fighting 
> that our HSQ ends up gelling or solidifying before we use the entire 
> bottled, I’m wondering if by prepping smaller quantities from dry HSQ 
> as needed would be a better way to manage shelf life.
>
> *Mason Risley*
>
> /Process Development Engineer/
>
> /Clair and John Bertucci Nanotechnology Laboratory /
>
> 5000 Forbes Street, Pittsburgh PA 15213
>
> nanofab-staff at lists.andrew.cmu.edu 
> <mailto:nanofab-staff at lists.andrew.cmu.edu>| 
> http://www.nanofab.ece.cmu.edu/
>
> ph: 412.268.5419 | cell : 505.795.4805
>
> *From:*labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> 
> *On Behalf Of *Mark K Mondol
> *Sent:* Saturday, March 9, 2019 5:06 PM
> *To:* Michael Rooks <michael.rooks at yale.edu>; labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] Has anyone using thicker than 200nm HSQ 
> for EBL patterning?
>
> As usual I agree with Mike, but have to chime in anyway. Applied 
> Quantum Materials in Canada offers dry HSQ, which you mix with MIBK to 
> make a solution. I just got some and haven't used it yet, but others 
> have. As it is dry you can make whatever dilution you want to achieve 
> thicker films.
>
> ------------------------------------------------------------------------
>
> *From:*labnetwork-bounces at mtl.mit.edu 
> <mailto:labnetwork-bounces at mtl.mit.edu> 
> [labnetwork-bounces at mtl.mit.edu] on behalf of Michael Rooks 
> [michael.rooks at yale.edu]
> *Sent:* Saturday, March 09, 2019 8:50 AM
> *To:* labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>
> *Subject:* Re: [labnetwork] Has anyone using thicker than 200nm HSQ 
> for EBL patterning?
>
> Multiple-spins seldom produce good results. It's easier to use a 
> thicker solution of HSQ. Of course you can buy thicker HSQ, such as 
> Fox-16, but if you are in a hurry you can thicken the 6% HSQ (well, 
> any resist really) by bubbling nitrogen through it. Just put a tube in 
> the bottle and blow in some dry nitrogen. The solvent will evaporate, 
> and the bubbles will keep the solution agitated, so a skin does not 
> form on the surface. No need to be precise about the solution. Just 
> keep bubbling until you get the thickness you want.
>
> ------------------------------------
> Michael Rooks
> Yale Institute for Nanoscience and Quantum Engineering
> nano.yale.edu
>
> On 3/8/2019 10:02 PM, Zhao, Mengdi wrote:
>
>     Hello everyone,
>
>     I am trying to spin 350nm HSQ by double coating XR1541 6% at
>     2000rpm and bake at 80C between coating. However, HSQ thickness
>     measured by reflectance spectrum actually get thinner after the
>     second spin and bake. I wonder if the HSQ still get dissolved
>     again during the 2nd dispense even with 80C bake for 4min after
>     the first coating. Any suggestion on getting over 200nm HSQ spin
>     coated on Si?
>
>     Best regards,
>
>     Mengdi
>
>
>
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