[labnetwork] Silane and Dichlorosilane Line Evacuation

[Rizik Michael]

Bruce,

>From my experience in the high tech industry none of the specialty gas tubing including Silane and DCS are evacuated when the tools are not in use. All lines remain charged for immediate processing when needed. However, it is up to you and the universities policy whether to evacuate the lines or not.

Excess flow switches need to be integrated with the gas panel within the gas cabinet.

Orbitally welded SS316L EP single wall tubing is acceptable.

Regards

From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Bruce Tolleson
Sent: Wednesday, February 13, 2019 10:48 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Silane and Dichlorosilane Line Evacuation

Dear users of Silane and Dichlorosilane,
When your systems that use silane and dichlorosilane are not in use do you evacuate the lines going to the tool? We are looking for the best practices for gas line safety in a student environment microelectronic clean room.
The gas lines are wall mount or overhead coaxial stainless steel all welded lines with excess flow sensors.
What are you doing with you silane and dichlorosilane lines?
Thank you,

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

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