[labnetwork] Argon in a BCl3 cylinder

Joseph E. Palmer jpalmer at Princeton.EDU
Thu Jun 20 09:14:00 EDT 2019


Sean,

      From a research point of view, I would see this as an unacceptable 
unknown.  I would strongly suggest changing out the cylinder.

Regards,

Joe Palmer
Operations Manager
PRISM MNFL
Princeton University

On 6/19/2019 4:40 PM, Paolini, Steven wrote:
>
> Sean,
>
>   I am not entirely sure, but it’s not likely that the gases will 
> completely disassociate from each other, even if the pressure drops. 
> I’m assuming that because the vapor pressure of BCL3 is a constant 
> because it is a liquid, you are determining that mostly Ar is being 
> consumed because of the pressure drop. I would recommend a complete 
> pump and purge of the entire gas circuit and replacing the cylinder of 
> BCL3.
>
> The simplest way to evaluate the gas concentrations is with an RGA but 
> I don’t think it’s a good idea to expose the filament to a corrosive 
> such as BCL3
>
>     Steve “Equipment Dood” Paolini
>
> Steve Paolini
>
> Principal Equipment Engineer
>
> Harvard University Center for Nanoscale Systems
>
> 11 Oxford St.
>
> Cambridge, MA 02138
>
> 617- 496- 9816
>
> spaolini at cns.fas.harvard.edu
>
> www.cns.fas.harvard.edu
>
> *From:* labnetwork-bounces at mtl.mit.edu 
> <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Rinehart, Sean
> *Sent:* Wednesday, June 19, 2019 1:15 PM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] Argon in a BCl3 cylinder
>
> Hello all,
>
> Recently our facility’s BCl3 cylinder had been charged with argon, 
> increasing the delivery pressure to 25 psi. The cause has been 
> corrected, but now I’m evaluating whether or not the cylinder needs to 
> be replaced, and would appreciate some advice.
>
> Since the root issue was fixed, the pressure has slowly dropped from 
> 25 psi to 15 psi with use. Based on this, it seems like with more use 
> the argon should completely deplete from the cylinder, but maybe 
> someone can tell me if that’s actually true, and if there’s a way to 
> evaluate gas concentrations. Additionally, the plasma glow is whitish 
> instead of pink, so there’s definitely BCl3 content in the delivered gas.
>
> Thank you,
>
> Sean Rinehart
>
> Assistant Director, Cleanroom Operations
>
> Yale University
>
> 203 432 4303
>
>
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