[labnetwork] SU-8 in a DRIE

[Christopher Raum]

Hi Kurt,

One alternative might be KMPR. It's sort of a next generation SU-8 (also by
MicroChem/IBM), that may not have the same contamination issues. It is
highly selective in fluorine plasma etches like SU-8, can be spread thick
(I've done >100um for fused quartz etching), and also has a special solvent
designed to make stripping much more easy than SU-8. It's a negative epoxy
based resist (also like SU-8).

Draw backs are that it's quite expensive, and you should store it in a
freezer so it keeps for up to a year. One way to deal with this is buy a
bunch of single use syringes, fill them with the KMPR, and freeze the
syringes. If you're dealing with users, that also makes it easier to sell
it by the syringe.

Regards,

Chris Raum
--
R&D Engineer 3
Experimental Cosmology Group
Radio Astronomy Lab
University of California, Berkeley
151 LeConte Hall
Berkeley, CA,
Email:        crraum at gmail.com
Alt Email: craum at berkeley.edu

On Tue, May 7, 2019 at 2:26 PM Kurt Kupcho <kurt.kupcho at wisc.edu> wrote:

> Labnetwork -
>
>
>
> We have been asked to allow SU-8 in our DRIE.  I am reluctant to do so
> because of reports I have read that SU-8 contaminates ICP etch chambers
> worse than regular photoresist and it can produce antimony contaminants on
> the surface from the SU-8.
>
>
>
> Do any of you have experience in allowing SU-8 in your DRIE or denying
> it?  What was your decision based on?
>
>
>
> Thank you for your help.
>
>
>
> -          Kurt
>
>
>
>
>
> ---------------------------------------------------
>
> Kurt Kupcho
>
> Process Engineer/Safety Officer
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>
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