[labnetwork] sputter materials - Ru & Bi

[Vlahakis, James]

Hi everyone, one of our users is interested in sputtering materials we are unfamiliar with - bismuth and ruthenium. They would be used in our "dirty" sputter tool, which has few material restrictions and users deposit on a variety substrates -

Easy or difficult to sputter? Any hazards to consider? Contamination issues? Any info would be greatly appreciated

Thanks

jim

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