[labnetwork] sputter materials - Ru & Bi

[Clark O.D.]

We have some experience with RuO2 sputtering at Southampton, one user was interested but never had the time to conduct a full optimisation of the sputtering. I recall that pressure was significant in obtaining good enough adhesion to the substrate, which was possibly Pt

________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Vlahakis, James <James.Vlahakis at tufts.edu>
Sent: 10 May 2019 19:52:20
To: 'labnetwork at mtl.mit.edu'
Subject: [labnetwork] sputter materials - Ru & Bi


Hi everyone, one of our users is interested in sputtering materials we are unfamiliar with – bismuth and ruthenium. They would be used in our “dirty” sputter tool, which has few material restrictions and users deposit on a variety substrates -



Easy or difficult to sputter? Any hazards to consider? Contamination issues? Any info would be greatly appreciated



Thanks



jim


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