[labnetwork] e-beam evaporation after e-beam lithography

[Aju Jugessur]

Pradnya,

This is a common issue. Are you using Ebeam evaporation to coat the ebeam resist coated samples?
If yes, the scattered electrons may be exposing your ebeam resist as well, resulting in what you observe on your samples.

Aju

Aju Jugessur Ph.D. IEEE Sr. Member
Director, Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC)
Engineering Staff Council Member (Communications and Outreach)
Discovery Learning Center
University of Colorado Boulder | College of Engineering & Applied Science
1111 Engineering Drive – 1B09 DLC | Boulder, CO 80309-0422 | P: 303.735.5019| F: 303.492.2199
https://www.colorado.edu/facility/cosinc
E-mail: aju.jugessur at colorado.edu<mailto:aju.jugessur at colorado.edu>
Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever
(CliftonStrengths)

[signature_1381777236]
[signature_1976523186]

From: <labnetwork-bounces at mtl.mit.edu> on behalf of Pradnya Chabbi <pradnya.chabbi at gmail.com>
Date: Friday, November 15, 2019 at 5:57 AM
To: "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu>
Subject: [labnetwork] e-beam evaporation after e-beam lithography

Dear all,
We are trying to deposit Ni-10nm and Au-50nm on top patterned EL9-PMMA e-beam lithography sample for liftoff. But the deposited film is grainy and agglomerated.
This problem does not occur with photolitithography resists or for any other depositions. It only arises in case of samples that have undergone e-beam lithography and have patterned e-beam resist on top. We are unable to troubleshoot the root cause. Attaching an image below

Has anyone else faced similar problems?
Did you manage to troubleshoot the issue and find a solution?
Kindly let us know.


[cid:image003.png at 01D59B9A.B649B3D0]

--
Thanks & regards
Pradnya
-------------------------------------------
Process Technologist,
CEN, IITBNF, Electrical Engg Dept, Annexe,
IIT Bombay, Mumbai, Powai- 400076
Contact - 09420391187(M)
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20191115/bdb47893/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image001.jpg
Type: image/jpeg
Size: 70328 bytes
Desc: image001.jpg
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20191115/bdb47893/attachment.jpg>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image002.png
Type: image/png
Size: 3107 bytes
Desc: image002.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20191115/bdb47893/attachment.png>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image003.png
Type: image/png
Size: 19664 bytes
Desc: image003.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20191115/bdb47893/attachment-0001.png>