[labnetwork] Subcontracting dry etching scenarios

[Morrison, Richard H., Jr]

Hi,

How is the wafer masked for the etch?
How deep is the etch?
Have you already developed the ICP/RIE process if so what tool was it on?

Remember that an ICP/RIE is only going to be operational 90% of the time due to cleans and PM schedules. Then the vendor would have other customers to work in so with your wafer volumes this will be a challenge.

10K wafers per year is ~ 193 wafers per week assuming no photolitho operation a 5 minute etch with overhead is really 7-8 minutes so it would take 1544 minutes to just etch, that is 25 hours work per week. Then you need to add in inspections and clean operations.

200K wafers per year is ~3846 per week you will need 30768 minutes of etch time a week or 512 fab hours, a 24/7 fab is 168 hours per week so you would need 5 tools.

Good luck with your search, Draper has a small capability nowhere what you need, try IMT in Santa Barbara Ca.

Rick



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Fabien Dauzou
Sent: Wednesday, October 16, 2019 2:18 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Subcontracting dry etching scenarios

Dear Labnetwork,

I am wondering if you can help us, or maybe give us some direction.

As a startup with potential customers we are looking for subcontracting part of our process.
I cannot find it but It would be nice and useful to have a list of all facilities and their possible prototyping/preproduction capacities. Let me know if you have one!

Below are our possible scenarios:
Scenario 1 :
10K wafers
4'' fused-silica wafer 0.55 mm
ICP-RIE ~ 5 min etch time

Total price or /wafer? timing?

Scenario 2 :
200K wafer/year
4'' fused-silica wafer 0.55 mm
ICP-RIE ~ 5 min etch time

Feasibility % ? Total price or $/wafer? Timing?

If any facilities is capable of these challenges, please contact me.

Best regards, Bien cordialement,

Fabien Dauzou (Jr. Eng.)
R&D Process Engineer/Entrepreneur
fabien at edgehogtech.com<mailto:fabien at edgehogtech.com>
Mob: 438-868-1657
https://www.edgehogtech.com/
[cid:image001.png at 01D584AE.8DE070D0]
780 Av. Brewster, RC-016, Montreal, QC, Canada, H4C 2K1
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