[labnetwork] Handling and processing of CdZnTe substrates

[Hadi Esmaeilsabzali]

Colleagues,


Hope you are all keeping safe and healthy.


We have a potential project mainly involving ALD on CdZnTe substrates. I know that CZT is quite soft and brittle, and chips easily. We would use an inline HEPA filter to minimize the contamination of our exhaust system. We would also use a HEPA vacuum to clean up any potential particles in the load-lock. What other measures do we need to consider? In terms of the PPE and the tool/facility?


Hadi


Hadi Esmaeilsabzali, PhD
4D LABS, SFU

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