[labnetwork] Ruthenium evaporation

[Chen, Hang]

Hi, Everyone

I hope you are safe at home.

A user needs to evaporator Ruthenium in our cleanroom, the SDS states that the dust is combustible. Does anyone has experience with the process? What would be the best way to run it safely.

Thanks

Hang

--
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen at ien.gatech.edu<mailto:hang.chen at ien.gatech.edu>
https://sums.gatech.edu

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