[labnetwork] Conformal electron beam resist coating over 3D structures

[Orad Reshef]

Dear Adam,

I don't have a direct answer to your question, but I have a lead. You
should try contacting the authors of this paper:
https://science.sciencemag.org/content/349/6254/1310.abstract

They do a lot of great fab, but in this paper in particular they are able
to nanopattern gold nanostructures on a very "hilly" substrate. Probably
they needed to have a conformal resist on their structure before getting
started.

I remember meeting one of them at a conference and they said it was
extremely extremely challenging, so likely they have 1 or 2 experiences
that might benefit your process.

Orad

Orad Reshef, PhD

Département de physique | Department of Physics
Université d’Ottawa | University of Ottawa
boydnlo.ca | reshef.ca


On Wed, Aug 19, 2020 at 11:47 AM Hathaway, Malcolm R <
hathaway at cns.fas.harvard.edu> wrote:

> Hi Adam,
>
> Do you mean conformal, or planarizing?  I would expect most
> resists/liquids to cover the surface in a level film (i.e. planarizing),
> with the tips extending out of the resist layer, perhaps getting *some *coating.
> Or do you want a truly conformal coating, like you would expect from ALD
> deposition?
>
> What is your ultimate goal, and your next step in the process?
>
>
> Mac
> ------------------------------
> *From:* labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu>
> on behalf of Adam Legacy <dradamlegacy at gmail.com>
> *Sent:* Tuesday, August 18, 2020 5:11 PM
> *To:* labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] Conformal electron beam resist coating over 3D
> structures
>
> Hi,
> We need to coat 3D pyramidal structures (similar to the picture) with 300
> nm EBL resist ZEP520A. The height of the pyramid is around 5 microns. The
> target resists thickness is around 300 nm. The pyramids are on a 100mm
> diameter wafer and made out of SiO2.
> Anyone can provide such a service? Do anyone has experience
> coating similar micro-hills? I spin-coated some shallow 1-micron cavities
> before with the same resist and it was successful conformal coating. I may
> need to spray coat or resist evaporation service for this application. What
> will be suitable for this?
> Please advise.
> Best regards,
> Adam.
>
> [image: getImage.jpg]
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