[labnetwork] Conformal electron beam resist coating over 3D structures

[Kamal Yadav]

Hi Adam,

Spray coating does make sense. For something like AZ 9260, 520 Cps, diluted
with acetone 90%, you need atleast few tens of micron trench depth to have
conformal coating. Less trench depth than that spray works as if spin
coated with this resist and dilution.

Now your case is different. The resist is thinner or with lower viscosity
and you have a hill instead of trench, both of which may work in your
favor. I would check with SUSS Microtec or similar vendor for this
application.

Also dry resist film application may damage your features and may not work
as well, but worth looking into, I think.

Do you need conformal coating or just protect the features, that will also
be critical to understand.

Thanks,
Kamal



On Tue, Aug 18, 2020 at 5:15 PM Adam Legacy <dradamlegacy at gmail.com> wrote:

> Hi,
> We need to coat 3D pyramidal structures (similar to the picture) with 300
> nm EBL resist ZEP520A. The height of the pyramid is around 5 microns. The
> target resists thickness is around 300 nm. The pyramids are on a 100mm
> diameter wafer and made out of SiO2.
> Anyone can provide such a service? Do anyone has experience
> coating similar micro-hills? I spin-coated some shallow 1-micron cavities
> before with the same resist and it was successful conformal coating. I may
> need to spray coat or resist evaporation service for this application. What
> will be suitable for this?
> Please advise.
> Best regards,
> Adam.
>
> [image: getImage.jpg]
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-- 
Thanks,
Kamal
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