[labnetwork] GCA/MANN 3600F Pattern Generator support

[Greg Mullins]

Yeah Mike...I was going to recommend Matt...as he’s still servicing many of
these early tools.

There are some minor differences on the early systems like the PG, but
usually if you don’t start tweaking the stage servo pots, you can get the
stage mechanics back in shape and it should play nice.

An important pm service is an annual stage pull... where are you remove the
stages from the system and clean them all up...the undersides have some
bearings and Rulon shoes, as well as rack and pinion gearing that need to
be cleaned up and lubricated, as well as cleaning and re-lubricating the
surfaces that these shoes slide on. We call them keys and ways.  If the
stage doesn’t move freely by its design, because of gunked up oil
underneath the stage where you can’t reach for cleaning, it definitely
slows them down and that’s when you start getting into timing issues on a
pattern generator as it’s trying to originate...hence Auto Focus failure
(which tends to be the first error message in the software that it likes to
toss out).

I’ve also found that if the speed of the stage during OG is too slow to
reach the load position, autofocus failure...so it’s a balance game.

Check in with Matt and see how that goes!!

Best,
G~

On Fri, Dec 4, 2020 at 3:15 PM Matt Pace <matt at 3ctechnical.com> wrote:

> Hi Mike,
>
> I used to work for Bob Scruton (as did one of my employees, Mike Arnold),
> many moons ago. Bob was definitely the expert when it came to these older
> GCA pattern generators, but the 3600F is very similar to a GCA 4800 or even
> 6300 - especially in regards to the stages, Both Mike and I have worked on
> the 3600s here and there, so we may be able to help you out a bit.
>
> Unfortunately we don't have many PG parts because the demand for servicing
> them mostly dried up and we focused in on taking care of the new GCA tools
> instead. Regardless, if you can provide more details on the errors (maybe
> send some pictures of the actual errors printed on the screen) and describe
> what you are running when you get the particular errors, we'll put our
> heads together and see what you may be up against.
>
> All the best,
> Matt
>
> ---
>
> Matt Pace
>
> 3c Technical
>
> matt at 3ctechnical.com
>
> www.3ctechnical.com
>
> 480-963-4559 voice
>
> On Fri, Dec 4th, 2020 at 11:12 AM, Greg Mullins <gregmullins at berkeley.edu>
> wrote:
>
>> Hi Mike,
>> I used to work with RZ Enterprises, and we did service all GCA tools,
>> including pattern generators…In fact I still have one that I take care of
>> here at Berkeley. Let me put together some information later today to see
>> if I can help you through this, and also I will put out feelers on who is
>> still servicing them.
>> Best,
>> G~
>>
>> On Fri, Dec 4, 2020 at 8:54 AM Michael Call <michael.call at maine.edu>
>> wrote:
>>
>> We have an issue with "Focus Signal lost" and "time out" errors on our
>> pattern generator.  Sometimes the column will attempt to focus off of the
>> glass plate(laser system losing counts?).  I've cleaned and oiled the
>> stages, changed plates and all of the usual, but with no luck.  I know that
>> Bob Scruton passed away a few years ago.  Has anyone taken over the service
>> of these machines?
>>
>> Thanks,
>>
>> --
>> Mike Call
>> Research Engineer
>> University of Maine
>> Frontier Institute for Research in Sensor Technologies (FIRST)
>> Coordinated Research entities Cleanroom
>> ESRB Barrows Hall room 294
>> 207-581-3382
>> [image: image.png]
>> _______________________________________________
>> labnetwork mailing list
>> labnetwork at mtl.mit.edu
>> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>>
>> --
>> Greg Mullins
>> R&D Engineer 4
>>
>> Marvell Nanofabrication Laboratory
>> University of California at Berkeley
>> 520 Sutardja Dai Hall, MS 1754
>> Berkeley, CA 94720-1754
>> Office: (510) 809-8625
>> Email: gregmullins at berkeley.edu
>>
>
> --
Greg Mullins
R&D Engineer 4

Marvell Nanofabrication Laboratory
University of California at Berkeley
520 Sutardja Dai Hall, MS 1754
Berkeley, CA 94720-1754
Office: (510) 809-8625
Email: gregmullins at berkeley.edu
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