[labnetwork] Cambridge Savanah 100 (1st gen) ALD fast acting solenoid valve no longer made

[Wajdyk, Brian L.]

Hello,

We have a first generation Cambridge ALD system.  They have changed the system and the custom fast acting solenoid valves used to pulse the precursor are no longer made.  They are sealed unit so there is no chance at a repair.  Has anyone found a drop in replacement?  Any replacement?  Design for new heather block with different valve?  Its a good system but the valves have gummed up over the last 12 years.

Here is the part # for the Parker Valve that is no longer made:
099‐0381‐900 Parker Solenoid Valve for Savannah S100 ‐ 3‐way N.C. (2‐way) valve, 1/4" Vacuseal female fittings, 0.116" orifice, Kalrez, 0.5 amp @ 24 V

Thanks!
Brian



*********************************************
Brian Wajdyk
Facility Manager / Research
Center for Nanoscale Science and Engineering.
University of Kentucky
Office: ASTeCC 372
Email: Brian.Wajdyk at uky.edu
Ph: 859-218-6548
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