[labnetwork] Cambridge Savanah 100 (1st gen) ALD fast acting solenoid valve no longer made

[Eric Deguns]

Hello Brian,

You may have seen one of the most recent notes regarding a Savannah -  I'm
one of the original Cambridge NanoTech folks.  The original ALD team is now
a part of Veeco.

The electromechanical valves from this system were discontinued by Parker
in 2008 and we stopped selling them in 2006.  Unfortunately, we haven't
found a electromechanical replacement which exhibits any of the reliability
or heat tolerance of the industry standard Swagelok ALD valves. The long
story short is that we don't have a drop in replacement for the Parker
valves.

That being said, we do have some upgrade options for you to get you into a
modern setup but they'd involve replacing the entire ALD valve manifold.

Please reach out to me at edeguns at veeco.com and/or ALDsupport at veeco.com and
we can discuss some options for you.

Thanks in advance,

Eric



On Thu, Feb 6, 2020 at 7:04 PM Wajdyk, Brian L. <brian.wajdyk at uky.edu>
wrote:

> Hello,
>
> We have a first generation Cambridge ALD system.  They have changed the
> system and the custom fast acting solenoid valves used to pulse the
> precursor are no longer made.  They are sealed unit so there is no chance
> at a repair.  Has anyone found a drop in replacement?  Any replacement?
> Design for new heather block with different valve?  Its a good system but
> the valves have gummed up over the last 12 years.
>
> Here is the part # for the Parker Valve that is no longer made:
> 099‐0381‐900 Parker Solenoid Valve for Savannah S100 ‐ 3‐way N.C. (2‐way)
> valve, 1/4" Vacuseal female fittings, 0.116" orifice, Kalrez, 0.5 amp @ 24 V
>
> Thanks!
> Brian
>
>
>
> *********************************************
> Brian Wajdyk
> Facility Manager / Research
> Center for Nanoscale Science and Engineering.
> University of Kentucky
> Office: ASTeCC 372
> Email: Brian.Wajdyk at uky.edu
> Ph: 859-218-6548
> *********************************************
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