[labnetwork] Cambridge Savanah 100 (1st gen) ALD fast acting solenoid valve no longer made

[Wajdyk, Brian L.]

Thanks,
Eric

What is the modern replacement valve?  I understand that it will not fit the current manifold.  I have replaced one that required some creative plumbing.  It was only usable at that position due to the space requirements.  Is the modern valve another custom?

Thanks,
Brian



*********************************************
Brian Wajdyk
Facility Manager / Research
Center for Nanoscale Science and Engineering.
University of Kentucky
Office: ASTeCC 372
Email: Brian.Wajdyk at uky.edu
Ph: 859-218-6548
*********************************************
________________________________
From: Eric Deguns <edeguns at gmail.com>
Sent: Friday, February 7, 2020 9:41 AM
To: Wajdyk, Brian L. <brian.wajdyk at uky.edu>
Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>; Eric Deguns <edeguns at veeco.com>
Subject: Re: [labnetwork] Cambridge Savanah 100 (1st gen) ALD fast acting solenoid valve no longer made

Hello Brian,

You may have seen one of the most recent notes regarding a Savannah -  I'm one of the original Cambridge NanoTech folks.  The original ALD team is now a part of Veeco.

The electromechanical valves from this system were discontinued by Parker in 2008 and we stopped selling them in 2006.  Unfortunately, we haven't found a electromechanical replacement which exhibits any of the reliability or heat tolerance of the industry standard Swagelok ALD valves. The long story short is that we don't have a drop in replacement for the Parker valves.

That being said, we do have some upgrade options for you to get you into a modern setup but they'd involve replacing the entire ALD valve manifold.

Please reach out to me at edeguns at veeco.com<mailto:edeguns at veeco.com> and/or ALDsupport at veeco.com<mailto:ALDsupport at veeco.com> and we can discuss some options for you.

Thanks in advance,

Eric



On Thu, Feb 6, 2020 at 7:04 PM Wajdyk, Brian L. <brian.wajdyk at uky.edu<mailto:brian.wajdyk at uky.edu>> wrote:
Hello,

We have a first generation Cambridge ALD system.  They have changed the system and the custom fast acting solenoid valves used to pulse the precursor are no longer made.  They are sealed unit so there is no chance at a repair.  Has anyone found a drop in replacement?  Any replacement?  Design for new heather block with different valve?  Its a good system but the valves have gummed up over the last 12 years.

Here is the part # for the Parker Valve that is no longer made:
099‐0381‐900 Parker Solenoid Valve for Savannah S100 ‐ 3‐way N.C. (2‐way) valve, 1/4" Vacuseal female fittings, 0.116" orifice, Kalrez, 0.5 amp @ 24 V

Thanks!
Brian



*********************************************
Brian Wajdyk
Facility Manager / Research
Center for Nanoscale Science and Engineering.
University of Kentucky
Office: ASTeCC 372
Email: Brian.Wajdyk at uky.edu<https://nam04.safelinks.protection.outlook.com/?url=http%3A%2F%2Fuky.edu%2F&data=02%7C01%7Cbrian.wajdyk%40uky.edu%7C19f34052a80346782ba608d7abdb7e90%7C2b30530b69b64457b818481cb53d42ae%7C0%7C0%7C637166831520964507&sdata=5JGmcg6XNsdbnTden7lEtCdoqeLPF9ZCPM%2Fy0zTp4Y4%3D&reserved=0>
Ph: 859-218-6548
*********************************************
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