[labnetwork] Dry etching Zinc Sulfide and/or Zinc Selenide bulk samples

[Aebersold,Julia W.]

We haven't etched that material, but any plasma processing with BCL3 we raise the processing temp of the cooling water.  BCL3 loves to condense at room temps, so we take our chiller up to 35 degrees C to make sure it stays in vapor form.  And wrap the gas lines with heat tape.

Cheers!

Julia Aebersold, Ph.D.
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shepard, Jeremiah J
Sent: Wednesday, February 12, 2020 3:42 PM
To: labnetwork at mtl.mit.edu
Cc: Raghunathan, Nithin <nithin at purdue.edu>; Dilley, Neil R <ndilley at purdue.edu>
Subject: [labnetwork] Dry etching Zinc Sulfide and/or Zinc Selenide bulk samples

Does anyone have experience etching Zinc Sulfide and Zinc Selenide?

It appears chemistry would involve BCL3.

My primary concern is chamber contamination, any experience or thoughts?  Thank you in advance!

Thank you,
Jerry Shepard
Research Engineer
Purdue University
Birck Nanotechnology Center

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