[labnetwork] Dry etching Zinc Sulfide and/or Zinc Selenide bulk samples

[Demis D. John]

We have a relatively successful recipe which works with both ZnS & ZnSe:
https://wiki.nanotech.ucsb.edu/wiki/index.php/RIE_Etching_Recipes#ZnS_Etching_.28RIE_2.29
– Methane/Hydrogen RIE etch.

This is on one of our older Capacitive RIE systems:
https://wiki.nanotech.ucsb.edu/wiki/index.php/RIE_2_(MRC)
We do have some very sensitive etches on this tool, and long ZnS etches did
not appear to cause any visible problems to those.
-- Demis

----------------------------------------
           demis at ucsb.edu
*   Process Scientist Manager*
 UCSB Nanofabrication Facility <https://www.nanotech.ucsb.edu/>
----------------------------------------



On Thu, Feb 13, 2020 at 5:43 PM Aebersold,Julia W. <
julia.aebersold at louisville.edu> wrote:

> We haven’t etched that material, but any plasma processing with BCL3 we
> raise the processing temp of the cooling water.  BCL3 loves to condense at
> room temps, so we take our chiller up to 35 degrees C to make sure it stays
> in vapor form.  And wrap the gas lines with heat tape.
>
>
>
> Cheers!
>
>
>
> Julia Aebersold, Ph.D.
>
> Manager, Micro/Nano Technology Center
>
> University of Louisville
>
> Shumaker Research Building, Room 233
>
> 2210 South Brook Street
>
> Louisville, KY  40292
>
> (502) 852-1572
>
>
>
> http://louisville.edu/micronano/
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu [mailto:
> labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Shepard, Jeremiah J
> *Sent:* Wednesday, February 12, 2020 3:42 PM
> *To:* labnetwork at mtl.mit.edu
> *Cc:* Raghunathan, Nithin <nithin at purdue.edu>; Dilley, Neil R <
> ndilley at purdue.edu>
> *Subject:* [labnetwork] Dry etching Zinc Sulfide and/or Zinc Selenide
> bulk samples
>
>
>
> Does anyone have experience etching Zinc Sulfide and Zinc Selenide?
>
>
>
> It appears chemistry would involve BCL3.
>
>
>
> My primary concern is chamber contamination, any experience or thoughts?
> Thank you in advance!
>
>
>
> Thank you,
>
> Jerry Shepard
>
> Research Engineer
>
> Purdue University
>
> Birck Nanotechnology Center
>
>
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