[labnetwork] Potential Cu contamination in sputtering chamber used for superconducting material deposition

[Gloria Qiu]

Dear all,

Here at Research and Prototype Foundry (Sydney, Australia), users have been
using the sputtering system extensively for superconducting materials, i.e.
NbTiN and MoRe. I am wondering if it is OK to add an alloy of Si/Al/Cu
(0.95/0.025/0.025) to the chamber. Is there any potential contamination for
the superconducting materials?

Any input is appreciated.

Thanks in advance.


Gloria
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