[labnetwork] BCl3 Condensation

[Rinehart, Sean]

Hi all,

I know that BCl3 condensation and line heating have been brought up several times in the past so this seemed like a good place to ask about the consequences of BCl3 condensation. Barring subsequent exposure to moisture is there any permanent damage to the delivery system, or does it just affect process gas mixture and block gas flow until it evaporates off?

Also, if the delivery pressure is regulated to below the vapor pressure at the coldest point in the delivery system would that effectively eliminate the risk of condensation?

Thank you,

Sean Rinehart
Assistant Director, Cleanroom Operations
Yale University
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