[labnetwork] BCl3 Condensation

[Paolini, Steven]

Sean,
  If the BCl3 is being delivered to a vacuum system such as an etcher, I would highly recommend delivering the gas at sub-atmospheric pressures. As we all know, the lower the pressure, the lower the boiling point. I have struggled with heating gas lines and increasing the room temperature gradient for some years until I started delivering at sub-atmospheric (~5" Hg). I have never had a problem since.
Good luck,
   Equipment Dood

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Rinehart, Sean
Sent: Tuesday, February 18, 2020 9:42 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] BCl3 Condensation

Hi all,

I know that BCl3 condensation and line heating have been brought up several times in the past so this seemed like a good place to ask about the consequences of BCl3 condensation. Barring subsequent exposure to moisture is there any permanent damage to the delivery system, or does it just affect process gas mixture and block gas flow until it evaporates off?

Also, if the delivery pressure is regulated to below the vapor pressure at the coldest point in the delivery system would that effectively eliminate the risk of condensation?

Thank you,

Sean Rinehart
Assistant Director, Cleanroom Operations
Yale University
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