[labnetwork] KLA P7 profiler and Bruker DektakXT DXT-A

[N Shane Patrick]

Hi Edmond,

We have a ~5 year old Dektak-XT that was bought to support our two other older profilometers. We’ve been pleased with the accuracy and general performance, but the software can be a bit glitchy at times. We’ve also found KLA/Tencor’s software’s automation functions (for scanning repetitive features across a large area) to be easier and more reliable than than Bruker’s. I still personally prefer the Dektak, but it has its drawbacks as with any tool.

N. Shane Patrick
Manager, Lab Operations and Safety
Electron Beam Lithography
Washington Nanofabrication Facility (WNF) 
National Nanotechnology Coordinated Infrastructure (NNCI)
University of Washington - NanoES
Fluke Hall 129, Box 352143
(206) 221-1045
patricns at uw.edu <mailto:patricns at uw.edu>
http://www.wnf.washington.edu/ <http://www.wnf.washington.edu/>

> On Feb 24, 2020, at 2:42 PM, Edmond Chow <kchow10 at gmail.com> wrote:
> 
> Hi,
> 
> We are trying to decide whether to purchase KLA P7  profiler or Bruker Dektak DXT-A profiler.
> 
> We will appreciate your feedback if you have those systems in your lab.
> 
> Bruker system seems to slightly cheaper, but they limit to 55mm scan range, I wonder how good is their stitching process if we need to scan 100mm wafer.
> 
> Thanks.
> 
> -- 
> Edmond Chow
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