[labnetwork] HF compatible container for single wafer dipping

[Albert William (Bill) Flounders]

Take a look here:
https://www.shape-master.com/silicon-wafer-dippers
or here:
https://www.ptfeparts.com/applications/teflon-ptfe-labware/
They offer "horizontal" dippers and baskets that may meet your needs.

The big supplier is Entegris. They often have minimum orders.
They have vertical dippers; unsure if they have any horizontal products.
https://www.entegris.com/shop/en/USD/products/wafer-handling/wafer-processing/labware/Dippers/p/Dippers

Custom chucks (vertical) for single sided processing:
https://www.idonus.com/activities/products/mems-products/wet-processing-wafer-chucks.html

Bill Flounders
UC Berkeley

On Tue, Feb 25, 2020 at 8:41 AM Chito Kendrick <cekendri at mtu.edu> wrote:

> Dear,
>
> Before I spend a whole lot of time fabricating a container, I do have a
> plastic welder, I want to see if anyone knows of a company that sells
> narrow containers with a flat stable bottom for single wafer dipping of
> wafers.
>
> We have a fairly standard wet bench for processing wafers by
> RCA/HF/solvents. However this means we need to have at least 10L of
> chemicals to cover 25 4" wafers in a standard carrier if we want to use the
> bench baths. For single wafers we have flat containers to use less HF, but
> students have a lot of issues with getting wafers in/out with teflon
> tweezers and with the extra PPE gloves. We do have holders for single
> wafers, but with the amount of processing we are currently doing 10L of 5%
> HF or 6:1 BOE is just a waste for the odd wafer and leaving HF in the bath
> does lead to it reducing in volume.
>
> Therefore, I am looking for a container that is 1"x5"x8" (WxDxH) and has a
> large base as it will be top heavy being so narrow. This will allow wafer
> dipping with the holders and removes handling issues.
>
> Regards,
>
> Chito Kendrick
>
> --
> Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>
>
> Managing Director of the Microfabrication Facility
> Research Assistant Professor
> Electrical and Computer Engineering
> Michigan Technological University
> Room 436 M&M Building
> 1400 Townsend Dr.
> Houghton, Michigan 49931-1295
>
> 814-308-4255
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