[labnetwork] HF compatible container for single wafer dipping

[Morrison, Richard H., Jr]

Rick Morrison here from Draper, I would look at Cole-Parmer and VWR they have many different poly and Teflon tanks pre made and ready for sale.


https://www.coleparmer.com/p/rectangular-tanks-with-cover-hdpe-and-pp/5697?searchterm=Rectangular%20Tanks%20with%20Cover%2C%20HDPE%20and%20PP

https://us.vwr.com/store/product?categoryId=4952954&catName=Rectangular%20Tanks

A 4” wafer in a Teflon wand can go into a 1.5L beaker such as below, we do that all the time, saves on chemicals. Beakers at:

https://us.vwr.com/store/catalog/product.jsp?product_id=4537528

Single wafer wand used to be sold Entegris  We have also just cut a cassette down to only hold 2 wafers and this reduces the size.


Rick


Richard H. Morrison
Principal Member of the Technical Staff
Draper
555 Technology Square
Cambridge, MA
02139-3573

Work  617-258-3420
Cell  508-930-3461
www.draper.com<http://www.draper.com>




From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Chito Kendrick
Sent: Tuesday, February 25, 2020 11:12 AM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] HF compatible container for single wafer dipping

Dear,

Before I spend a whole lot of time fabricating a container, I do have a plastic welder, I want to see if anyone knows of a company that sells narrow containers with a flat stable bottom for single wafer dipping of wafers.

We have a fairly standard wet bench for processing wafers by RCA/HF/solvents. However this means we need to have at least 10L of chemicals to cover 25 4" wafers in a standard carrier if we want to use the bench baths. For single wafers we have flat containers to use less HF, but students have a lot of issues with getting wafers in/out with teflon tweezers and with the extra PPE gloves. We do have holders for single wafers, but with the amount of processing we are currently doing 10L of 5% HF or 6:1 BOE is just a waste for the odd wafer and leaving HF in the bath does lead to it reducing in volume.

Therefore, I am looking for a container that is 1"x5"x8" (WxDxH) and has a large base as it will be top heavy being so narrow. This will allow wafer dipping with the holders and removes handling issues.

Regards,

Chito Kendrick

--
Chito Kendrick Ph.D.<https://sites.google.com/site/chitokendrickphd/>

Managing Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295

814-308-4255<tel:814-308-4255>
________________________________
Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
________________________________
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20200225/26761b60/attachment.html>