[labnetwork] HF compatible container for single wafer dipping

Chito Kendrick cekendri at mtu.edu
Tue Feb 25 12:09:06 EST 2020


Hi Rick and Bill,

I just saw the horizontal dippers. Some reason I never found them before
when I was looking. Thank you for your help.

Chito Kendrick

On Tue, Feb 25, 2020 at 11:58 AM Morrison, Richard H., Jr <
rmorrison at draper.com> wrote:

> Rick Morrison here from Draper, I would look at Cole-Parmer and VWR they
> have many different poly and Teflon tanks pre made and ready for sale.
>
>
>
>
>
>
> https://www.coleparmer.com/p/rectangular-tanks-with-cover-hdpe-and-pp/5697?searchterm=Rectangular%20Tanks%20with%20Cover%2C%20HDPE%20and%20PP
>
>
>
>
> https://us.vwr.com/store/product?categoryId=4952954&catName=Rectangular%20Tanks
>
>
>
> A 4” wafer in a Teflon wand can go into a 1.5L beaker such as below, we do
> that all the time, saves on chemicals. Beakers at:
>
>
>
> https://us.vwr.com/store/catalog/product.jsp?product_id=4537528
>
>
>
> Single wafer wand used to be sold Entegris  We have also just cut a
> cassette down to only hold 2 wafers and this reduces the size.
>
>
>
>
>
> Rick
>
>
>
>
>
> Richard H. Morrison
>
> Principal Member of the Technical Staff
>
> Draper
>
> 555 Technology Square
>
> Cambridge, MA
>
> 02139-3573
>
>
>
> Work  617-258-3420
>
> Cell  508-930-3461
>
> www.draper.com
>
>
>
>
>
>
>
>
>
> *From:* labnetwork-bounces at mtl.mit.edu [mailto:
> labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Chito Kendrick
> *Sent:* Tuesday, February 25, 2020 11:12 AM
> *To:* Fab Network <labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] HF compatible container for single wafer dipping
>
>
>
> Dear,
>
>
>
> Before I spend a whole lot of time fabricating a container, I do have a
> plastic welder, I want to see if anyone knows of a company that sells
> narrow containers with a flat stable bottom for single wafer dipping of
> wafers.
>
>
>
> We have a fairly standard wet bench for processing wafers by
> RCA/HF/solvents. However this means we need to have at least 10L of
> chemicals to cover 25 4" wafers in a standard carrier if we want to use the
> bench baths. For single wafers we have flat containers to use less HF, but
> students have a lot of issues with getting wafers in/out with teflon
> tweezers and with the extra PPE gloves. We do have holders for single
> wafers, but with the amount of processing we are currently doing 10L of 5%
> HF or 6:1 BOE is just a waste for the odd wafer and leaving HF in the bath
> does lead to it reducing in volume.
>
>
>
> Therefore, I am looking for a container that is 1"x5"x8" (WxDxH) and has a
> large base as it will be top heavy being so narrow. This will allow wafer
> dipping with the holders and removes handling issues.
>
>
>
> Regards,
>
>
>
> Chito Kendrick
>
>
> --
>
> Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>
>
> Managing Director of the Microfabrication Facility
> Research Assistant Professor
> Electrical and Computer Engineering
> Michigan Technological University
> Room 436 M&M Building
> 1400 Townsend Dr.
> Houghton, Michigan 49931-1295
>
> 814-308-4255
> ------------------------------
> Notice: This email and any attachments may contain proprietary (Draper
> non-public) and/or export-controlled information of Draper. If you are not
> the intended recipient of this email, please immediately notify the sender
> by replying to this email and immediately destroy all copies of this email.
> ------------------------------
>


-- 
Chito Kendrick Ph.D. <https://sites.google.com/site/chitokendrickphd/>

Managing Director of the Microfabrication Facility
Research Assistant Professor
Electrical and Computer Engineering
Michigan Technological University
Room 436 M&M Building
1400 Townsend Dr.
Houghton, Michigan 49931-1295

814-308-4255
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