[labnetwork] Exposure control for flake exfoliation

Lino Eugene lino.eugene at uwaterloo.ca
Fri Feb 28 08:53:49 EST 2020


Dear all,

We have users who want to exfoliate flakes on substrate in our cleanroom. These flakes are attached to a Scoth tape.

I am wondering how you deal with this transfer in your fab, especially with hazardous materials like tellurides. Do you allow this process in your fab? If so, is it done under a fume hood or in a glove box?

Best,

Lino Eugene, P.Eng., Ph.D.,
Micro/nanofabrication process engineer
Quantum-Nano Fabrication and Characterization Facility
QNC 1611
University of Waterloo
200 University Avenue West
Waterloo, ON, Canada
N2L 3G1

Ph: +1 519-888-4567 #37788
Cell: +1 226-929-1685
Website: https://fab.qnc.uwaterloo.ca/

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