[labnetwork] SPTS Technologies

[Greg Hollingshead]

Hello Dr. Michael Khbeis and Bob Henderson;

We can usually control undercutting (footing) at a stop layer and/or provide endpoint on a stop layer.  However, not knowing the stop layer material or the system you are using it is difficult to advise further.  If you are using a legacy system this may or may not be possible.

Can you give Steve and I more information on the etch process?  Depths, feature sizes, stop layer material?  Also what model of DRIE system from SPTS is it?

Regards,


From: mtkhbeis at gmail.com<mailto:mtkhbeis at gmail.com> <mtkhbeis at gmail.com<mailto:mtkhbeis at gmail.com>>
Sent: Thursday, February 27, 2020 10:42 PM
To: Mick Krieg <Mick.Krieg at spts.com<mailto:Mick.Krieg at spts.com>>
Subject: Fwd: [labnetwork] SPTS DRIE Question

FYI
Dr. Michael Khbeis
(C) 443.254.5192<tel:443.254.5192>

Begin forwarded message:
From: bob.henderson at etchedintimeinc.com<mailto:bob.henderson at etchedintimeinc.com>
Date: February 27, 2020 at 1:05:26 PM PST
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] SPTS DRIE Question

I know a number of you have SPTS DRIE systems and I would like to ask what hardware configuration is necessary to prevent undercut (Footing) at the sacrificial stop layer at completion of etch. I have been told that it requires a different frequency generator than 13.56 MHz used for the bulk etch. Do the newer tools also have some method of endpoint on the stop layer or is it just a timed etch? Your help is appreciated

Bob Henderson
Etched In Time, Inc
941 S. Park Lane
Tempe, Arizona 85281
Phone: 602-206-6154
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Greg Hollingshead, Southwestern Regional Sales Manager
SPTS Technologies Ltd, A KLA Company
M. +1 (972) 342 9722    (Austin TX)     spts.com

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