[labnetwork] RIE Lower Electrode Question

[Ahdam Ali]

Chang,

Not sure about the effects on your process. I may recommend cleaning with a
scotch-brite + PTFE specific solvent before running an O2 clean.

Best,

On Fri, Jul 17, 2020 at 4:43 PM Chang, Long <lvchang at central.uh.edu> wrote:

> Hi All,
>
> The lower electrode to our RIE system has taken quite a bit of abuse over
> the decade, see photo. There are scratches and pits caused by wafer shards.
> There’s also a film of something (probably PTFE oil) in the middle.
>
> Does anyone know how these scratches and pits might affect the Bosch
> Process? Any recommendations for cleaning this up?
>
> Thanks,
> Long
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>


-- 
Ahdam Ali
R&D Engineer
UCSD Calit2 Nano3 Facility
Atkinson Hall M/C0436
9500 Gilman Drive
La Jolla, CA  92093-0436

Email: aali at eng.ucsd.edu <pdriscoll at eng.ucsd.edu>
Phone: (858)-534-4768
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20200720/146e15fd/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: IMG_1386 2.jpeg
Type: image/jpeg
Size: 72565 bytes
Desc: not available
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20200720/146e15fd/attachment.jpeg>