[labnetwork] Dow ebeam resist delays

[Aaron Hryciw]

Hi Franklin,

This has been an ongoing issue lately, and has come up for discussion in
the Labnetwork before; see here
<https://mtl.mit.edu/pipermail/labnetwork/2019-September/003867.html> for
my response to the thread at that time.

In brief, at our centre we have switched from Dow Corning XR-1541 to a dry
HSQ powder ("AQM SiOx") from Applied Quantum Materials
<https://www.aqmaterials.com/aqm-silsesquioxane-polymers>, which has
benefits of a much longer shelf life (while dry), and allows you to mix it
with MIBK to the required concentration as needed, avoiding the problem of
purchasing several concentrations which are not used up by their expiry
date.  It is made locally (in Edmonton, Canada), but is distributed
internationally, and we have had no problems with procurement.  The only
point I would add to my post linked above is that it is important to use
MIBK which is as anhydrous as possible, to ensure the solution does not
turn into a gel.  AQM recommends using HPLC grade MIBK
<https://www.fishersci.com/shop/products/methyl-isobutyl-ketone-exceeds-a-c-s-specifications-hplc-grade-99-spectrum-2/18611704>
to
mix with their HSQ powders; this is what they supply with their HSQ powders
if sold as a HSQ + MIBK kit.

Cheers,

 – Aaron




Aaron Hryciw, PhD, PEng

Fabrication Group Manager

University of Alberta - nanoFAB

W1-060 ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4 Ph: 780-940-7938
www.nanofab.ualberta.ca



On Tue, Sep 8, 2020 at 5:38 PM Franklin Monzon <fm at fmconsultingresearch.com>
wrote:

> Hi All,
>
> We at HRL are having enormous difficulty with procurement of ebeam resist
> from Dow, and I wonder if anyone else is having this problem. Specifically,
> we are trying to acquire XR-1541. We use 2%, 4%, and 6% formulations but
> are having special problems with 2%.
>
> Lead times have increased generally in 2020 (perhaps for some good
> reasons!), but the distributors we work with now cannot even get a firm
> timeline from Dow. We told them we are willing to order larger quantities
> than usual but have been informed that that won't help.
>
> The shortage is starting to cause delays on key government programs, so
> I'd very much appreciate any insight from this group.
>
> Thanks for your advice!
> FM
> *********************************
> Franklin Monzon
> Director, Microfabrication Technology Laboratory
> HRL Laboratories
>
>
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