[labnetwork] Replacement for Leybold Dryvac 50P?

[Bill Kiether]

Hello,

We have a Leybold Dryvac 50P dry pump (model 13833) with a Roots Blower on
our Oxford PlasmaLab 80+ PECVD/RIE tool that has met it's final days. Has
anyone recently had one of these models refurbished (i.e. do you have a
good vendor? ) I have reached out to Leybold and a handful of vacuum pump
repair shops, but no luck so far.

Alternatively, has anyone successfully upgraded to a newer pumping stack on
this PECVD tool? What was your experience?

Bill Kiether
Sr. Research Engineer
NCSU Nanofabrication Facility
wjkiethe at ncsu.edu
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