[labnetwork] Replacement for Leybold Dryvac 50P?

[Shimon Eliav]

Hi Bill,

We had a similar story with our PlasmaLab 100, some years ago.

The system came originally equipped with an Adixen Pump with roots blower, I think similar to the Leybold pump you mentioned. The pump worked fine, but every four years we had to send it to be refurbished in France, an expensive process (money and also time).

I decided to exchange the Adixen pump for an equivalent Edwards, since we have local service at affordable prices here in Israel.

Our PlasmaLab system sends START/STOP and STAND-BY commands to the pump. Those are simple dry-contacts commands, but the technician from Edwards didn’t succeeded to make the connection. Then I came into the scene and with patience I made it work.

Since we have Edwards service available here near us, we programed the pump to “run to fail” and when the time comes we will send it for complete refurbishing, what will take one week to be done. I think it is a good arrangement. Much less expensive than the original situation and also faster.

Original Adixen Pump Model: ADS 602P
Edwards Pump model: IH600
Attached: PlasmaLab 100 Rough Pump Connections Schematics
Exchange Date: 02/2016 – five years and running!

Regards,

Shimon Eliav
The Hebrew University of Jerusalem
The Unit for Nano Fabrication
Jerusalem - ISRAEL





From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bill Kiether
Sent: Friday, 23 April 2021 21:03
To: labnetwork at mtl.mit.edu
Cc: Jon Lewis <jlewis at classone.com>; Philip Barletta <pbarlet at ncsu.edu>
Subject: [labnetwork] Replacement for Leybold Dryvac 50P?

Hello,

We have a Leybold Dryvac 50P dry pump (model 13833) with a Roots Blower on our Oxford PlasmaLab 80+ PECVD/RIE tool that has met it's final days. Has anyone recently had one of these models refurbished (i.e. do you have a good vendor? ) I have reached out to Leybold and a handful of vacuum pump repair shops, but no luck so far.

Alternatively, has anyone successfully upgraded to a newer pumping stack on this PECVD tool? What was your experience?

Bill Kiether
Sr. Research Engineer
NCSU Nanofabrication Facility
wjkiethe at ncsu.edu<mailto:wjkiethe at ncsu.edu>
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