[labnetwork] Dry pumps on ALD systems?

[Iulian Codreanu]

Hi Mac,

Our FlexAL came with an Adixen ADS 602P four years ago. At some point 
the service engineer had to adjust a breaker inside the tool's power box 
to allow the pump to draw more current at startup.

Cheers,

Iulian

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu

On 7/8/2021 1:56 PM, Mac Hathaway wrote:
> Hello Folks,
>
> I'm wondering: how many of you have tried a dry pump on your ALD system?
>
> If you have, how did it work out?
>
> If you could supply the following details, that would be great:
>
> ALD system model;
>
> Dry pump model and CFM;
>
> How long it's been running that way;
>
> Any issues you've run in to.
>
> For background, we have long been working under the assumption that, 
> due to the reactive nature of the ALD precursors, and the abrasive 
> nature of the effluent, PFPE-base wet pumps are the way to go. 
> However, we grow tired of dealing with pump oil and associated issues, 
> and we're using dry pumps successfully elsewhere in the fab...
>
> Thanks!
>
> Mac
>
>
> -- 
>
> Mac Hathaway
>
> Senior Process and Systems Engineer
>
> Harvard Center for Nanoscale Systems
>
> 11 Oxford St.
>
> Cambridge, MA02138
>
> 617-495-9012
>
>
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