[labnetwork] Dry pumps on ALD systems?

[April, Mark R.]

Hi Mac,
I have an Ebara  A10S dry pump connected to the ALD system at Draper.  Prior to the dry pump, I have a multi-trap with a SS gauze filter and an activated charcoal filter element.
The dry pump has been in operation since the purchase of the ALD in 2013 and we have not had any issues
Thanks

Mark R. April
Senior  Equipment Engineer
Microfabrication Laboratory
[color_logo_small4]
555 Technology Square
Cambridge, MA  02139
mapril at draper.com<mailto:mapril at draper.com>
O # 617-258-1613 C # 617-455-1596
www.draper.com<http://www.draper.com/>



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Iulian Codreanu
Sent: Friday, July 9, 2021 10:38 AM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Dry pumps on ALD systems?

Hi Mac,

Our FlexAL came with an Adixen ADS 602P four years ago. At some point the service engineer had to adjust a breaker inside the tool's power box to allow the pump to draw more current at startup.

Cheers,

Iulian



iulian Codreanu, Ph.D.

Director, Nanofabrication Facility

University of Delaware

Harker ISE Lab, Room 163

221 Academy Street

Newark, DE 19716

302-831-2784

http://udnf.udel.edu
On 7/8/2021 1:56 PM, Mac Hathaway wrote:
Hello Folks,

I'm wondering: how many of you have tried a dry pump on your ALD system?

If you have, how did it work out?

If you could supply the following details, that would be great:

ALD system model;

Dry pump model and CFM;

How long it's been running that way;

Any issues you've run in to.

For background, we have long been working under the assumption that, due to the reactive nature of the ALD precursors, and the abrasive nature of the effluent, PFPE-base wet pumps are the way to go.  However, we grow tired of dealing with pump oil and associated issues, and we're using dry pumps successfully elsewhere in the fab...

Thanks!

Mac

--

Mac Hathaway
Senior Process and Systems Engineer
Harvard Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA  02138
617-495-9012




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