[labnetwork] ICP STS ASE Issue

[Charles Ellis]

I assume you are coating your carrier wafer - too much exposed silicon can be a problem. Always make sure you develop your process for a fixed amount of exposed silicon and try to maintain it.

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________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Shepard, Jeremiah J <jshepar at purdue.edu>
Sent: Wednesday, July 21, 2021 8:43:32 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] ICP STS ASE Issue

I am having some trouble determining what this issue is? We have found a bad capacitor in the matching network, and replaced that, thought all was good but now we face this issue.

Now I am having trouble with grass formation on student sample. Anyone know where to look for this kind of thing? Is it just sample recipe or something else perhaps? Any thoughts are appreciated! Also unsure of what's going on with the carrier wafer around the sample...?

Thanks,
Jerry Shepard

[cid:b5ebd4e6-f9a5-41ac-91e8-fb784f88dacc]
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