[labnetwork] Hold time after fusion bond

[Macdonald, Robert (GE Research, US)]

I am looking for information on the limits of hold time after a fusion bond. 

Whether it be Si to Si or Si to SiO2 or SiO2 to SiO2; Whether hydrophobic or hydrophilic, for what amount of time can the bonded pair be held prior to anneal? 

I have not found a paper with this information. We have had success with times under sixteen hours. But we have not done a thorough study. 

Any input welcome. 

Thanks,
Rob MacDonald
GE Research



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