[labnetwork] Hold time after fusion bond

[JEFFREY MATTHEW NICOLAS MC KAY]

Hi Rob,

Is there any reason to hold the pair before the anneal, some other
processing being done? I assume you are doing manual wafer bonding (not
tool assisted)? During graduate work, we made a lot of manual hydrophilic
SiO2-SiO2 bonds, and did not notice any degradation on holding off anneals
in terms of bond strength/bond area for sample weeks+ old (samples kept in
~70 F environment, low humidity).

Kind Regards,
Jeff McKay

On Tue, Oct 12, 2021 at 5:06 PM Macdonald, Robert (GE Research, US) <
robert.macdonald at ge.com> wrote:

> I am looking for information on the limits of hold time after a fusion
> bond.
>
> Whether it be Si to Si or Si to SiO2 or SiO2 to SiO2; Whether hydrophobic
> or hydrophilic, for what amount of time can the bonded pair be held prior
> to anneal?
>
> I have not found a paper with this information. We have had success with
> times under sixteen hours. But we have not done a thorough study.
>
> Any input welcome.
>
> Thanks,
> Rob MacDonald
> GE Research
>
>
>
> Sent from my iPhone
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20211014/c03fd051/attachment.html>