[labnetwork] Ebeam evaporation of Ge2Sb2Se5 - risks?

[Christophe Clément]

Hello Labnetwork community 

We have a user that want to use our shared Ebeam evaporator to deposit Ge2Sb2Se5 material. 
As the tool is used by all of our user, I do not want to contaminate the chamber with something potentially toxic. 
Does any of you can share expericence with such material? Cleaning method, prefered deposition way: Ebeam or sputtering ? 

Thank you for your help 



Christophe Clément 

Technicien laboratoire 

Laboratoire de microfabrication (LMF) 

Groupe des Couches Minces (GCM) [ http://www.gcmlab.ca/ | www.gcmlab.ca ] 


Ecole Polytechnique de Montréal [ http://www.polymtl.ca/ | www.polymtl.ca ] 


Département de génie physique 

* 2900 Boulevard Edouard Monpetit 

Pavillon JAB 
Campus de l'Université de Montréal 
Montréal (Québec) H3T 1J4 


8 [ mailto:christophe.clement at polymtl.ca | christophe.clement at polymtl.ca ] 


( 514 340 4711 #2417 

Fax : 514 340 5195 




-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20220417/d67ec869/attachment.html>