[labnetwork] Ebeam evaporation of Ge2Sb2Se5 - risks?

[Timothy J Gilheart]

Hi Christoph,

I’d be very cautious about introducing that to a shared tool. 

Both Sb and Se present with toxicity concerns, which may be sufficient reason alone to deny this request.

Both of them also have relatively high vapor pressure, so they can really contaminate the chamber for subsequent processes, unless you have some specific measures in place to address that.

I’m also not sure about the stoichiometry and/or structure of Ge2Sb2Se5 deposited through PVD. This material (as well as GSST, the Te-doped version of the same thing) is a glass formed through melt-quenching; some of those properties may be lost through subsequent melting and redeposition. I found some references detailing thermal evaporation procedures for GSST, but none for e-beam, so maybe it’s possible on the right tool?

You should decide what’s best for your tool and facility, but I’d deny this material for a general purpose shared tool on the basis of toxicity concerns alone.

Best of luck,

-- 
Tim Gilheart, Ph.D.
Research Scientist - Nanofabrication Cleanroom Manager,
Shared Equipment Authority (SEA), Rice University
Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu

> On Apr 17, 2022, at 1:30 PM, Christophe Clément <christophe.clement at polymtl.ca> wrote:
> 
> Hello Labnetwork community
> 
> We have a user that want to use our shared Ebeam evaporator to deposit Ge2Sb2Se5 material.
> As the tool is used by all of our user, I do not want to contaminate  the chamber with something potentially toxic.
> Does any of you can share expericence with such material? Cleaning method, prefered deposition way: Ebeam or sputtering ?
> 
> Thank you for your help
> 
> Christophe Clément
> 
> Technicien laboratoire
> 
> Laboratoire de microfabrication (LMF)
> 
> Groupe des Couches Minces (GCM) www.gcmlab.ca <https://urldefense.com/v3/__http://www.gcmlab.ca/__;!!BuQPrrmRaQ!iNrMecdNdexJ_V7_bDC3K-pUJRKLya-WkrjHZyJRhhqXJ5_6G5IDyJGUM2aqcy2lt2E5KSccMOkobgwnuLApwCagdMCJABY1BmtZdYJzbQ$>
> Ecole Polytechnique de Montréal www.polymtl.ca <https://urldefense.com/v3/__http://www.polymtl.ca/__;!!BuQPrrmRaQ!iNrMecdNdexJ_V7_bDC3K-pUJRKLya-WkrjHZyJRhhqXJ5_6G5IDyJGUM2aqcy2lt2E5KSccMOkobgwnuLApwCagdMCJABY1BmsGUTKhnQ$>
> Département de génie physique
> 
> * 2900 Boulevard Edouard Monpetit
> 
> Pavillon JAB
> Campus de l'Université de Montréal
> Montréal (Québec) H3T 1J4
> 
> 
> 8 christophe.clement at polymtl.ca <mailto:christophe.clement at polymtl.ca>
> ( 514 340 4711 #2417
> 
> Fax : 514 340 5195
> 
>  
>  
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!BuQPrrmRaQ!iNrMecdNdexJ_V7_bDC3K-pUJRKLya-WkrjHZyJRhhqXJ5_6G5IDyJGUM2aqcy2lt2E5KSccMOkobgwnuLApwCagdMCJABY1BmtAlOk9ww$ 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20220418/eaa81fae/attachment.html>