[labnetwork] Query on Deuterated Silane

[Khan, Mughees]

Dear All,

I was wondering if our community members can share their experiences on using Deuterated Silane (SiD4) instead of conventional SiH4 as a precursor for PECVD tools for low-loss optical films.

Any insights, pros/cons from a process as well as equipment side would be very helpful.

Thanks in advance for any pointers and guidance!

Best regards,
Mughees
--
________________
Mughees Khan, PhD
Senior Scientist | Center for Nanoscale Systems | Harvard University
11 Oxford St | LISE (G38) | Cambridge, MA 02138
mkhan at fas.harvard.edu<mailto:mkhan at fas.harvard.edu> | O: 617.496.7102 | www.cns.fas.harvard.edu<http://www.cns.fas.harvard.edu>





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