[labnetwork] Microfabrication class

[Evans, Gary]

Hi Sergi,
As part of a junior level lecture course on semiconductors (at the Streetman/Bannerjee level), the lab portion of the course has students fabricating p-channel MOSFET transistors on 4” (100 mm) wafers using a 4 mask level process.  I am attaching the traveler that is being used this semester.  Typically there are 10 labs over the 15 week semester, with the devices being tested in the last lab.  Enrollment is limited to about 28 students because we limit the number of students in the clean room to 4 students at a time, and having 7 lab sessions outside of class lectures a week is about the scheduling limit.  The lab sessions are nominally 2 hours, but often shorter and occasionally longer.  I always try to have two experienced Teaching Assistants in each lab session for safety.  You likely can get a donated furnace for diffusion (we use spin on boron) and oxidation.  We have a sputter system to deposit Al for contacts.  Most of the time testing consists of just probe-testing at the wafer level.  A few times we have diced up the wafer and mounted some transistors on TO headers.

I also teach a compound semiconductor course and in the lab portion of that course we fab InP based HBTs, GaAs based HEMPTs and semiconductor lasers (GaAs or InP based).  In a 15 week semester, we can easily fab any two types of devices, although on occasion we have done all three.  IntelliEPI generously provides the epitaxial material.  These devices only require photolithography, wet etching and metallization (TiAu, e-beam deposited).  If interested I can send the process travelers for these devices, too.
If you want more information (mask details, course syllabus…)  let me know or just give me a call.
Best Regards,
Gary Evans
Professor
Southern Methodist University
214 768 3032 (o)
214 207 9427 (cell)

On Oct 7, 2022, at 12:39 PM, Sergi Lendinez <sergilendi at lsu.edu<mailto:sergilendi at lsu.edu>> wrote:


[EXTERNAL SENDER]

Dear labnetwork community,



Here at LSU we are planning to start a microfabrication class soon, and I would like to ask for your opinions about setting up this kind of class at a university. I am not sure if this topic has been discussed here before, so I apologize for any possible duplication.

Any information would be very helpful, like do's and don't's, devices being fabricated, number of students, students/teacher ratio, course load, etc.

I'd like to fabricate some CMOS device, but we lack some critical equipment such as a diffusion tube furnace, cvd, or packaging tools, so I'm looking for alternate ideas: maybe a photodiode/detector, a Hall sensor or some micro-fluidic channels. If anyone has some experience fabricating these devices in a class setup, is there anything you'd be willing to share?

Many thanks,
Sergi



---
Sergi Lendinez, Ph. D.
Assistant Director NFF | Louisiana State University
Center for Advanced Microstructures and Devices (CAMD)
6980 Hefferson Highway, Baton Rouge, LA 70803
(225) 578-9378
sergilendi at lsu.edu<mailto:sergilendi at lsu.edu> | lsu.edu/nanofabrication<https://lsu.edu/nanofabrication>



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